Handbook of Photomask Manufacturing Technology (eBook, ePUB)

Redaktion: Rizvi, Syed

• Format: ePub

Produktbeschreibung

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep pace with these demands. Photomask technology is one of the key areas to achieving this goal. This valuable reference provides a comprehensive summary of all areas of mask technology in a single work, featuring contributions from 40 internationally reputable authors from industry, academia, government, national labs, and consortia. They discuss conventional masks and their supporting technologies, as well as next-generation technologies such as extreme ultraviolet, electron projection, ion projection, and X-ray lithography.

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Produktdetails

• Verlag: Taylor & Francis eBooks
• Seitenzahl: 728
• Erscheinungstermin: 3. Oktober 2018
• Englisch
• ISBN-13: 9781351836722
• Artikelnr.: 73153942