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Discharges in a flowing background gas are used to produce charged and excited species for numerous applications including etching semiconductors and pumping gas discharge lasers (Pinhero and others, 1998). The effect of a flowing background gas on the charged and excited neutral species generation by an RF discharge in a flow tube and the diagnostics of the resulting plasma with a Langmuir probe have been investigated for pressures between 0.001 to 1 Torr and flow velocities up to 1000 m/s. This investigation was performed using a fluid method coupled to a chemical kinetic model and a hybrid Particle-In-Cell/Monte Carlo Collision modeling method based on the approaches of Boeuf, 1987 and Cartwright and others, 2000. A factor of two reduction in the sheath length was realized for an increase in flow velocity from 25 m/s to 500 m/s. This resulted in an increased average ionization rate and factor of ten increases in positive and negative ion densities, while the electron densities remained approximately constant. At pressures less than 0.01 Torr, existing probe theory was adequate for performing diagnostics, however, at pressures of 1 Torr convection limited probe theory underestimated the positive ion density of the flowing electronegative plasma by up to 50%. This work has been selected by scholars as being culturally important, and is part of the knowledge base of civilization as we know it. This work was reproduced from the original artifact, and remains as true to the original work as possible. Therefore, you will see the original copyright references, library stamps (as most of these works have been housed in our most important libraries around the world), and other notations in the work. This work is in the public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work. As a reproduction of a historical artifact, this work may contain missing or blurred pages, poor pictures, errant marks, etc. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.