Electron-Beam Interactions with Solids - Dapor, Maurizio
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The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron-solid interaction hasbecomethesubjectofanumberofinvestigators'workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical…mehr

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Produktbeschreibung
The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron-solid interaction hasbecomethesubjectofanumberofinvestigators'workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical problems. This method is very useful for the study of electron penetration in matter. The probabilistic laws of the interaction of an individual electron with the atoms constituting the target are well known. Consequently, it is possible to compute the macroscopic characteristics of interaction processes by simulating a large number of real trajectories, and then averaging them. The aim of this book is to study the probabilistic laws of the interaction of individual electrons with atoms (elastic and inelastic cross-sections); to - vestigate selected aspects of electron interaction with matter (backscattering coe?cients for bulk targets, absorption, backscattering and transmission for both supported and unsupported thin ?lms, implantation pro?les, seconda- electron emission, and so on); and to introduce the Monte Carlo method and its applications to compute the macroscopic characteristics of the inter- tion processes mentioned above. The book compares theory, computational simulations and experimental data in order to o?er a more global vision.
Autorenporträt
Dr. Maurizio Dapor is Head of the Interdisciplinary Laboratory for Computational Science of the European Centre for Theoretical Studies in Nuclear Physics and Related Areas (ECT*-LISC). He holds a M.Sc. degree in Physics and a Ph.D. degree in Materials Science and Engineering. His research covers Monte Carlo simulations of the transport of fast electrons in solids, with applications to the scanning electron microscopy and to several electron spectroscopies. He was Visiting Professor at the Departamento de Física Aplicada, Universidad de Alicante, from April to June 2016, and Leverhulme Visiting Professor at the Department of Materials Science and Engineering at the University of Sheffield from December 2014 to November 2015. He was Scientific Consultant at the Integrated Systems Laboratory of the Swiss Federal Institute of Technology (ETH), Zurich, from January to December 2009, and Research Associate at the University of Sheffield's Department of Engineering Materials from June 2007 to February 2008.