Simon M. Sze (Hrsg.)

Semiconductor Sensors

Herausgegeben:Sze, Simon M.

• Gebundenes Buch

Produktbeschreibung

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

A solutions manual is available upon request from the Wiley editorial board.

Produktdetails

• Verlag: Wiley & Sons
• 1. Auflage
• Seitenzahl: 576
• Erscheinungstermin: 28. Oktober 1994
• Englisch
• Abmessung: 240mm x 161mm x 35mm
• Gewicht: 940g
• ISBN-13: 9780471546092
• ISBN-10: 0471546097
• Artikelnr.: 09475967

Autorenporträt

S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.

Inhaltsangabe

Classification and Terminology of Sensors (S. Sze).
Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).
Acoustic Sensors (M. Motamedi & R. White).
Mechanical Sensors (B. Kloeck & N. de Rooij).
Magnetic Sensors (H. Baltes & R. Castagnetti).
Radiation Sensors (S. Audet & J. Steigerwald).
Thermal Sensors (S. Van Herwaarden & G. Meijer).
Chemical Sensors (S. Morrison).
Biosensors (A. Dewa & W. Ko).
Integrated Sensors (K. Najafi, et al.).
Appendices.
Index.