This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers.…mehr
This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.
Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang 2. Martensitic transformation S. Miyazaki 3. Deposition techniques for TiNi films A. D. Johnson 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee 6. Mechanical properties A. Ishida 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang 8. Ion irradiation T. LaGrange and R. Gotthardt 9. Laser post annealing and theory W. M. Huang and M. H. Hong Part III. Applications: 10. Overview of applications A. D. Johnson 11. Theory on shape memory microactuator Y. C. Shu 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim 13. Microactuator applications K. P. Mohanchandra and G. Carman 14. Microvalves M. Kohl 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang 18. Shape memory thin film composite microactuators E. Quandt 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.
Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang 2. Martensitic transformation S. Miyazaki 3. Deposition techniques for TiNi films A. D. Johnson 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee 6. Mechanical properties A. Ishida 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang 8. Ion irradiation T. LaGrange and R. Gotthardt 9. Laser post annealing and theory W. M. Huang and M. H. Hong Part III. Applications: 10. Overview of applications A. D. Johnson 11. Theory on shape memory microactuator Y. C. Shu 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim 13. Microactuator applications K. P. Mohanchandra and G. Carman 14. Microvalves M. Kohl 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang 18. Shape memory thin film composite microactuators E. Quandt 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.
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