Enabling Technology for MEMS and Nanodevices (eBook, PDF)

Advanced Micro and Nanosystems
Redaktion: Baltes, Henry; Tabata, Osamu; Korvink, Jan G.; Hierold, Christofer; Fedder, Gary K.; Brand, Oliver

• Format: PDF

Produktbeschreibung

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

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Produktdetails

• Verlag: Wiley-VCH
• Erscheinungstermin: 27. März 2013
• Englisch
• ISBN-13: 9783527675043
• Artikelnr.: 38486010