Kaiying Wang

Green Etching Techniques for MEMS Applications (eBook, PDF)

Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

• Format: PDF

Produktbeschreibung

Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS). With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication.

Features:

• Thorough analysis of fluorine-free, environmentally friendly MEMS etching alternatives
• Coverage of emerging technologies, including supercritical CO2, ionic liquids, and gas-phase selective etching
• Exploration of AI-driven process optimization for sustainable and efficient MEMS manufacturing
• Detailed industrial case studies highlighting successful implementation and scalability
• Clear discussions on regulatory drivers, market trends, and future roadmaps for sustainable microfabrication

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Produktdetails

• Verlag: Taylor & Francis eBooks
• Seitenzahl: 134
• Erscheinungstermin: 19. Dezember 2025
• Englisch
• ISBN-13: 9781040766941
• Artikelnr.: 76007413

Autorenporträt

Kaiying Wang received his PhD in condensed matter physics from the Institute of Physics, Chinese Academy of Sciences. He joined the University of South-Eastern Norway (USN) in 2007 as an associate professor and was promoted to professor in 2010. His research interests focus on micro-fabrication and nanotechnology, electrochemistry, photochemistry and nanodevices for environment and energy applications. For teaching, he has taught the Microfabrication (MFA4000, master) and Nanotechnology (TSE3120, bachelor) at the University of South-Eastern Norway since 2010. Meanwhile, he has participated in several national and European projects related to micro/nano fabrication technology. The related education programmes at USN include: (1) Sensor Systems and Innovation (2) Smart Systems Integrated Solutions, and (3) Micro- and Nano Systems Technology.

Inhaltsangabe

Chapter 1: Introduction to Green Etching in MEMS Manufacturing
Chapter 2: Theoretical Foundations and Mechanisms of Etching
Chapter 3: Fluorine-Free Dry Etching for MEMS
Chapter 4: Advanced Dry Etching Technologies for MEMS
Chapter 5: Wet Etching Alternatives for Green MEMS Processing
Chapter 6: Electrochemical Etching for Green MEMS Fabrication
Chapter 7: Energy-Efficient Plasma Etching Techniques for MEMS
Chapter 8: Industrial Adoption and Future Roadmap for Green MEMS Etching