Introduction to Focused Ion Beams (eBook, PDF)

Instrumentation, Theory, Techniques and Practice
Redaktion: Giannuzzi, Lucille A.; North Carolina State University Center for the Biology of

• Format: PDF

Produktbeschreibung

Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments

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Produktdetails

• Verlag: Springer US
• Seitenzahl: 357
• Erscheinungstermin: 18. Mai 2006
• Englisch
• ISBN-13: 9780387233130
• Artikelnr.: 37288183

Autorenporträt

Lucille A. Giannuzzi, FEI Company, Hillsboro, OR, USA / Fred A. Stevie, North Carolina State University, Raleigh, NC, USA

Inhaltsangabe

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.