Simeon M. Metev, Vadim P. Veiko

Laser-Assisted Microtechnology (eBook, PDF)

• Format: PDF

Produktbeschreibung

The book summarizes the significant results and outlines the impressive perspectives of laser technology in microelectronic fabrication. In the exposition of a large body of heterogenous material on laser machining of thin films, laser application in assembly and mounting operation and on laser assisted modification and synthesis of materials,the physico-chemical basis of the relevant process is presented, thogether with the technical and technological pecularities of its application in microelectronic technology. This approach should be interesting for a varied circle of readers.

---

Dieser Download kann aus rechtlichen Gründen nur mit Rechnungsadresse in A, B, BG, CY, CZ, D, DK, EW, E, FIN, F, GR, HR, H, IRL, I, LT, L, LR, M, NL, PL, P, R, S, SLO, SK ausgeliefert werden.

Produktdetails

• Verlag: Springer Berlin Heidelberg
• Seitenzahl: 240
• Erscheinungstermin: 8. März 2013
• Englisch
• ISBN-13: 9783642973277
• Artikelnr.: 53091240