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Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China.
The 19 papers are grouped as follows:
Chapter 1: Materials Science, Processing and Application,
Chapter 2: MEMS Design and Production
The 19 papers are grouped as follows:
Chapter 1: Materials Science, Processing and Application,
Chapter 2: MEMS Design and Production
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