Materials Science Applications of Ion Beam Techniques (eBook, PDF)

Redaktion: Balogh, A. G.; Walter, G.

• Format: PDF

Produktbeschreibung

The first particle accelerators were built in the early 1930's. For a long time, these devices were used exclusively by nuclear physicists. In the 1960's, extensive developments in measuring techniques occurred, mainly as a result of newly developed semiconductor devices. Further strong interest arose from the semiconductor industry, and ion implantation became widely accepted as being the ultimate tool for Si-based device fabrication.

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Produktdetails

• Verlag: Trans Tech Publications
• Seitenzahl: 512
• Erscheinungstermin: 29. Mai 1997
• Englisch
• ISBN-13: 9783035705201
• Artikelnr.: 69052946