- Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
- Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures
- Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces
MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
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