Microscopy of Semiconducting Materials (eBook, ePUB)

1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK
Redaktion: Cullis, A. G; Beanland, R.

• Format: ePub

Produktbeschreibung

With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigat

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Produktdetails

• Verlag: Taylor & Francis eBooks
• Erscheinungstermin: 1. Januar 2000
• Englisch
• ISBN-13: 9781040076781
• Artikelnr.: 73154133

Autorenporträt

A.G Cullis, R Beanland

Inhaltsangabe

High resolution microscopy and microanalysis (10 papers). Dislocations and
boundaries (9 papers). Self-organized and quantum domain structures (14
papers) . Epitaxy-growth phenomena (22 papers). Epitaxy-defect formation
(16 papers). Epitaxy-wide band-gap nitrides (20 papers). Processed silicon
and related materials (24 papers). Metallization, silicides and contacts (9
papers). Device studies and specimen preparation (7 papers). Scanning probe
microscopy (6 papers). Advanced scanning electron and optical microscopy
(20 papers).