Sergej Fatikow, Ulrich Rembold

Microsystem Technology and Microrobotics (eBook, PDF)

• Format: PDF

Produktbeschreibung

The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. Pictures and photos ease understanding and a wealth of references allow further work.

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Produktdetails

• Verlag: Springer Berlin Heidelberg
• Seitenzahl: 408
• Erscheinungstermin: 17. April 2013
• Englisch
• ISBN-13: 9783662034507
• Artikelnr.: 53289772

Autorenporträt

The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. Pictures and photos ease understanding and a wealth of references allow further work.

Inhaltsangabe

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.