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Collection of selected, peer reviewed papers from the 2013 International Conference on Microtechnology and MEMS (ICMM 2013), May 22-23, 2013, Beijing, China. The 28 papers are grouped as follows:
Chapter 1: Materials Science and Materials Processing Technology;
Chapter 2: Automation and Mechatronics;
Chapter 3: Data Processing and Information Technologies;
Chapter 4: Product Design.
Chapter 1: Materials Science and Materials Processing Technology;
Chapter 2: Automation and Mechatronics;
Chapter 3: Data Processing and Information Technologies;
Chapter 4: Product Design.
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