Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko

Radio-Frequency Capacitive Discharges (eBook, PDF)

• Format: PDF

Produktbeschreibung

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.

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Produktdetails

• Verlag: Taylor & Francis eBooks
• Seitenzahl: 304
• Erscheinungstermin: 14. Dezember 2017
• Englisch
• ISBN-13: 9781351419963
• Artikelnr.: 50517799

Autorenporträt

Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.

Inhaltsangabe

Basic Principals of the RF Capacitive Discharge Excitation of an RF
Discharge Electron Motion in an Oscillating Electric Field Electrodynamic
Plasma Characteristics and Interaction with Oscillating Field Electron
Production and Loss: Plasma Maintenance A Simplified Model of the RF
Discharge Constant Positive Plasma Potential Stochastic Heating of
Electrons RF Discharge Modes Moderate-Pressure RF Discharge Space Charge
Sheaths Experimental Current-Voltage Characteristics CVC and Normal Current
Densities in the a-Discharge (Theory and Numerical Simulation) The a-g
Transition Parameters The y-Discharge The a-g Transition at Moderate and
Low Pressures Coexistence of Two RF Modes in the Gap High-Pressure RF
Capacitive Discharges RF Discharge with Coated Electrodes Low-Pressure RF
Discharges and Asymmetry Effects Self-Bias in an Asymmetric Capacitively
Coupled Discharge Correlations Between Plasma and Sheath Parameters in an
Ambipolar Diffusion-Controlled Discharge Sheath Dynamics and Current
Anharmonicity in an Asymmetric Discharge Current Anharmonicity in
Asymmetric and Symmetric Discharges Battery Effect in an Asymmetric
Discharge Plasma 'Nontransparency' and Fast Electron Response to RF Field
and 'Oscillationless' Sheath Ions The Floating Potential The a-Sheath The
Energy Spectrum of Ions Bombarding the Electrode Surface RF Discharge in
Electronegative Gases Smooth a-g Transition and the g Mode Some Aspects of
Stochastic Heating of Electrons Numerical Simulation of Low-Pressure RF
Discharges Magnetron RF Discharge Experimental Methods and Measurements
Voltage Measurements and Current-Voltage Characteristics Probe Measurement
of Constant Space and Plasma Potentials Active DC Probing of an RF
Discharge A Method for Studying the Transverse Discharge Structure Optical
Methods for the Study of Spatial Discharge Structure Laser-Induced
Fluorescence and Laser-Optogalvanic Spectroscopy Excitation and Control of
an RF Discharge Application of RF Capacitive Discharges for Gas Laser
Excitation and Plasma Technology RF Discharge and Gas Lasers: A Brief
History Arguments in Favor of RF Laser Excitation Frequency Dependence of
Discharge and Active Laser Medium Parameters Selection of Designs and
Parameters of Transverse RF-Excited CO2 Lasers with Diffusional Cooling
Optical Resonators of Waveguide and Slab RF CO2 Lasers High Flowrate CO2
Lasers Excited by RF and Combined RF-DC Discharges Lasers with Alternative
Active Media Magnetic Stabilization of Slab Discharges Plasmachemical
Technology References Index