The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.
- Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors
- Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS
- Presents the only book to discuss both smart sensors and MEMS for industrial applications
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