Topics include:
- Crystallography and the crystalline materials used in many semiconductor devices
- Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
- Single crystal Si properties that conspire to make Si so important
- Optical properties of bulk 3D metals, insulators, and semiconductors
- Effects of electron and photon confinement in lower dimensional structures
- How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
- Metamaterials and how they could make for perfect lenses, changing the photonic field forever
- Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
- Electromechanical and optical analytical processes in miniaturized components and systems?
The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
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