Sputtering by Particle Bombardment (eBook, PDF)

Experiments and Computer Calculations from Threshold to MeV Energies
Redaktion: Behrisch, Rainer; Eckstein, Wolfgang

• Format: PDF

Produktbeschreibung

Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results to provide a state-of-the-art report covering theoretical as well as experimental aspects of sputtering. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems.

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Produktdetails

• Verlag: Springer Berlin Heidelberg
• Seitenzahl: 509
• Erscheinungstermin: 26. Juli 2007
• Englisch
• ISBN-13: 9783540445029
• Artikelnr.: 37368505

Autorenporträt

Rainer Behrisch, MPI für Plasmaphysik, Garching, Germany / Wolfgang Eckstein, MPI für Plasmaphysik, Garching, Germany

Inhaltsangabe

and Overview.- Computer Simulation of the Sputtering Process.- Sputtering Yields.- Results of Molecular Dynamics Calculations.- Energy and Angular Distributions of Sputtered Species.- Chemical Sputtering.- Electronic Sputtering with Swift Heavy Ions.